Elastic Recoil Detection Analysis (ERDA) of Hydrogen near Solid Surfaces
نویسندگان
چکیده
منابع مشابه
Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis
The composition of polycrystalline hafnium oxide thin films has been measured by heavy-ion elastic recoil detection analysis (HI-ERDA). The films were deposited by high-pressure reactive sputtering (HPRS) with oxygen plasma at pressures between 0.8 and 1.6 mbar and during deposition times between 0.5 and 3.0 hours. Hydrogen was found to be the main impurity and its concentration increased with ...
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Changes in hydrogen distribution in -phase titanium hydrides (TiH1:92 1:95), covered with titanium oxide layers (TiO and TiO2), were investigated by elastic recoil detection analysis (ERDA) after isochronal and isothermal annealing experiments. The hydrogen concentration near to the surface of the hydride exponentially decreased as a function of annealing time in the temperature range from 423 ...
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Hydrogen incorporation in silicon layers prepared by plasma-enhanced chemical-vapor deposition using silane dilution by hydrogen has been studied by infrared spectroscopy ~IR! and elastic recoil detection analysis ~ERDA!. The large range of silane dilution investigated can be divided into an amorphous and a microcrystalline zone. These two zones are separated by a narrow transition zone at a di...
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The objective of the proposed study is to use ANSTO’s transmission electron microscopy (TEM) and elastic recoil detection analysis (ERDA) combined with Rutherford back scattering (RBS). TEM and its associated techniques like HR-TEM (High resolution) and electron energy loss spectroscopy (EELS) are proposed to determine the lattice fringes and electron diffraction pattern with d-spacing correspo...
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An attempt was made to determine if emphysema and static lung recoil were related in a group of 65 excised human lungs. We studied 23 normal lungs, 24 lungs with an emphysema score of 5 or less, and 18 lungs with an emphysema score greater than 5. A comparison of the percentage of predicted elastic recoil revealed that both emphysema groups were significantly different from normal lungs. In add...
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ژورنال
عنوان ژورنال: Journal of the Vacuum Society of Japan
سال: 2010
ISSN: 1882-4749,1882-2398
DOI: 10.3131/jvsj2.53.608